Patterning of thin film NiMnSb using inductively coupled plasma etching

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3349-3353

  Hong, J ^a   Caballero, J A ^a   Lambers, E S ^a   Childress, J R ^a   Pearton, S J ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000380209     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590380     Document Type: Article

References (16)

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