-
2
-
-
0027608271
-
-
PCPPDW
-
S. J. Pearton, W. S. Hobson, C. R. Abernathy, F. Ren, T. R. Fullowan, A. Katz, and A. P. Perley, Plasma Chem. Plasma Process. 13, 311 (1993).PCPPDW
-
(1993)
Plasma Chem. Plasma Process.
, vol.13
, pp. 311
-
-
Pearton, S.J.1
Hobson, W.S.2
Abernathy, C.R.3
Ren, F.4
Fullowan, T.R.5
Katz, A.6
Perley, A.P.7
-
3
-
-
0003213999
-
-
Elsevier, New York
-
R. H. Burton, R. A. Gottscho, and G. Smolinsky, Dry Etching for Microelectronics, edited by R. A. Powell (Elsevier, New York, 1984).
-
(1984)
Dry Etching for Microelectronics
-
-
Burton, R.H.1
Gottscho, R.A.2
Smolinsky, G.3
-
5
-
-
0012522828
-
-
JCPSA6
-
I. Tokue, M. Kudo, M. Kusakabe, T. Honda, and Y. Ito, J. Chem. Phys. 96, 8889 (1992).JCPSA6
-
(1992)
J. Chem. Phys.
, vol.96
, pp. 8889
-
-
Tokue, I.1
Kudo, M.2
Kusakabe, M.3
Honda, T.4
Ito, Y.5
-
10
-
-
0012579499
-
-
JAPIAU
-
D. L. Mosteller, Jr., M. L. Andrews, J. D. Clark, and A. Garscadden, J. Appl. Phys. 74, 2247 (1993).JAPIAU
-
(1993)
J. Appl. Phys.
, vol.74
, pp. 2247
-
-
Mosteller, D.L.1
Andrews, M.L.2
Clark, J.D.3
Garscadden, A.4
-
12
-
-
0001013672
-
-
JAPIAU
-
Z. Lj. Petrović, W. C. Wang, M. Suto, J. C. Han, and L. C. Lee, J. Appl. Phys. 67, 675 (1990).JAPIAU
-
(1990)
J. Appl. Phys.
, vol.67
, pp. 675
-
-
Lj. Petrović, Z.1
Wang, W.C.2
Suto, M.3
Han, J.C.4
Lee, L.C.5
-
13
-
-
36549103848
-
-
JAPIAU
-
G. R. Scheller, R. A. Gottscho, T. Intrator, and D. B. Graves, J. Appl. Phys. 64, 4384 (1988).JAPIAU
-
(1988)
J. Appl. Phys.
, vol.64
, pp. 4384
-
-
Scheller, G.R.1
Gottscho, R.A.2
Intrator, T.3
Graves, D.B.4
-
14
-
-
0000130999
-
-
JCPSA6
-
J. A. Stockdale, D. R. Nelson, F. J. Davis, and R. N. Compton, J. Chem. Phys. 56, 3336 (1972).JCPSA6
-
(1972)
J. Chem. Phys.
, vol.56
, pp. 3336
-
-
Stockdale, J.A.1
Nelson, D.R.2
Davis, F.J.3
Compton, R.N.4
-
15
-
-
84943844874
-
-
SPHJAR
-
I. S. Buckel’nikova, Zh. Eksp. Teor. Fiz. 35, 1119 (1958) [Sov. Phys. JETP 8, 783 (1959)].SPHJAR
-
(1959)
Sov. Phys. JETP
, vol.8
, pp. 783
-
-
Buckel’nikova, I.S.1
-
16
-
-
85037191512
-
-
J. Olthoff, Ph.D. dissertation, University of Maryland, 1985 (unpublished)
-
J. Olthoff, Ph.D. dissertation, University of Maryland, 1985 (unpublished).
-
-
-
-
18
-
-
0003418036
-
-
World Scientific, Singapore
-
T. N. Rescigno, B. H. Lengsfield III, and C. W. McCurdy, in Modern Electronic Structure Theory, edited by D. R. Yarkony (World Scientific, Singapore, 1995), p. 501.
-
(1995)
Modern Electronic Structure Theory
, pp. 501
-
-
Rescigno, T.N.1
Lengsfield, B.H.2
McCurdy, C.W.3
-
19
-
-
0003464746
-
-
Plenum, New York
-
T. N. Rescigno, C. W. McCurdy, A. E. Orel, and B. H. Lengsfield III, in Computational Methods for Electron-Molecule Collisions, edited by W. M. Huo and F. A. Gianturco (Plenum, New York, 1995), p. 1.
-
(1995)
Computational Methods for Electron-Molecule Collisions
, pp. 1
-
-
Rescigno, T.N.1
McCurdy, C.W.2
Orel, A.E.3
Lengsfield, B.H.4
-
21
-
-
33747835834
-
-
Ann. Phys. (N.Y.)H. Feshbach19, 287 (1962).
-
(1962)
, vol.19
, pp. 287
-
-
Feshbach, H.1
-
27
-
-
4243990846
-
-
PRLTAO
-
B. I. Schneider, T. N. Rescigno, B. H. Lengsfield III, and C. W. McCurdy, Phys. Rev. Lett. 66, 2728 (1991).PRLTAO
-
(1991)
Phys. Rev. Lett.
, vol.66
, pp. 2728
-
-
Schneider, B.I.1
Rescigno, T.N.2
Lengsfield, B.H.3
McCurdy, C.W.4
-
28
-
-
0002183979
-
-
PLRAAN
-
A. P. P. Natelense, M. H. F. Bettega, L. G. Ferreira, and M. A. P. Lima, Phys. Rev. A 52, R1 (1995).PLRAAN
-
(1995)
Phys. Rev. A
, vol.52
, pp. R1
-
-
Natelense, A.P.P.1
Bettega, M.H.F.2
Ferreira, L.G.3
Lima, M.A.P.4
|