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Plasma Sources Science and Technology
Volumn 11, Issue 3, 2002, Pages 338-350
Equilibrium properties of Ar/SF6 inductive plasma discharges
(2)
Tuszewski, M
a
White, R R
a
a
LOS ALAMOS NATIONAL LABORATORY
(
United States
)
Author keywords
[No Author keywords available]
Indexed keywords
CARRIER CONCENTRATION; ELECTRONS; INERT GASES; INTERFEROMETRY; MASS SPECTROMETRY; MATHEMATICAL MODELS; NEGATIVE IONS; POSITIVE IONS; TEMPERATURE;
CHARGED PARTICLE DENSITIES; ELECTRON TEMPERATURES; LANGMUIR PROBES; MICROWAVE INTERFEROMETRY; PLASMA DISCHARGES;
INDUCTIVELY COUPLED PLASMA;
EID
:
0036674527
PISSN
:
09630252
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1088/0963-0252/11/3/317
Document Type
:
Article
Times cited : (
19
)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.
