Modeling and diagnostic of an SF6 RF plasma at low pressure

IEEE Transactions on Plasma Science

Volumn 28, Issue 1, 2000, Pages 278-287

  Riccardi, C ^a   Barni, R ^a   De Colle, F ^a   Fontanesi, M ^a  

^a Bicocca   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIFFUSION; ELECTROSTATIC DEVICES; NEGATIVE IONS; NUCLEAR REACTORS; PHOTODIODES; REACTION KINETICS; SULFUR COMPOUNDS; TRANSPORT PROPERTIES;

CAPACITIVELY COUPLED DISCHARGES; PLASMA MEASUREMENTS; RADIO FREQUENCY PLASMA;

PLASMAS;

EID: 0033730798     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.842923     Document Type: Article

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