A new look at the antenna effect

IEEE Transactions on Electron Devices

Volumn 49, Issue 7, 2002, Pages 1274-1282

  Verret, Doug P ^a,b   Krishnan, Anand ^a,b   Krishnan, Srikanth ^a,b  

^a IEEE   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

Antenna ratio (AR); Electron shading; Process induced damage (PID); Topography dependent charging (TDC)

Indexed keywords

ANTENNA CAPACITORS; ANTENNA EFFECT; CHARGE FLUX; ELECTRON SHADING; GATE DIELECTRICS; PLASMA NONUNIFORMITIES; PLASMA PROCESS-INDUCED DAMAGE; SURFACE POTENTIAL; TOPOGRAPHY DEPENDENT CHARGING;

ELECTRIC EXCITATION; EQUIVALENT CIRCUITS; GATES (TRANSISTOR); GLOW DISCHARGES; PLASMA APPLICATIONS;

CAPACITORS;

EID: 0036638273     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2002.1013286     Document Type: Article

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