Antenna device reliability for ULSI processing

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 601-604

  Krishnan, S ^a   Amerasekera, A ^a   Rangan, S ^a   Aur, S ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA ARRAYS; DEPOSITION; ELECTRIC POTENTIAL; GATES (TRANSISTOR); HOT CARRIERS; MOSFET DEVICES; PLASMA ETCHING; RADIATION DAMAGE; SEMICONDUCTOR DIODES; STRESSES;

ELECTRON SHADING EFFECT; PLASMA DAMAGE;

ULSI CIRCUITS;

EID: 0032256633     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)