Patterning of diamond microstructures by bulk and surface micromachining for MEMS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4557, Issue , 2001, Pages 24-30

  Fu, Yongqing ^a   Du, Hejun ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Diamond; MEMS; Microstructures; Reactive ion etching; Selective deposition

Indexed keywords

DEPOSITION; DIAMOND FILMS; METHANE; MICROMACHINING; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; POLYCRYSTALLINE MATERIALS; REACTIVE ION ETCHING; SILICA;

GAS MIXTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035766204     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.442941     Document Type: Conference Paper

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