SCOPUS 정보 검색 플랫폼

Volumn 11, Issue 3, 2001, Pages

Comparative characterization of nitrogen-rich CNx films prepared by different ICP-CVD techniques

(6) Popov, C a Bulir, J a Zambov, L a Jelinek, M a Delplancke Ogletree, M P a Kulisch, W a

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AUGER ELECTRON SPECTROSCOPY; CARBON NITRIDE; CHEMICAL BONDS; ELECTRONIC PROPERTIES; EMISSION SPECTROSCOPY; FILM PREPARATION; INDUCTIVELY COUPLED PLASMA; MASS SPECTROMETRY; OPTICAL PROPERTIES; PHASE COMPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE REACTIONS; TRANSPORT PROPERTIES; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC RECOIL DETECTION (ERD) ANALYSIS; OPTICAL EMISSION SPECTROSCOPY (OES);

THIN FILMS;

EID: 0034850004 PISSN: 11554339 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (1)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.