SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 544-551

Low-temperature sputter deposition and characterisation of carbon nitride films

(5) Baker, M A a Hammer, P a Lenardi, C a Haupt, J a Gissler, W a

a JOINT RESEARCH CENTRE (Italy)

Author keywords

Carbon nitride; Characterisation; Sputter deposition; Thin film

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BOMBARDMENT; NITRIDES; PHASE TRANSITIONS; SUBSTRATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; VOLATILE CARBON NITRIDE COMPOUNDS;

SPUTTER DEPOSITION;

EID: 0031388948 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00187-4 Document Type: Article

Times cited : (25)

References (13)

1
- 0001245503
- P. Hammer, W. Gissler, Diamond Relat. Mater. 5 (1996) 1152.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 1152
- Hammer, P.¹ Gissler, W.²

2
- 0030415484
- P. Hammer, M.A. Baker, C. Lenardi, W. Gissler, Thin Solid Films 290/291 (1996) 107.
- (1996) Thin Solid Films , vol.290-291 , pp. 107
- Hammer, P.¹ Baker, M.A.² Lenardi, C.³ Gissler, W.⁴

3
- 0042059097
- A.Y. Liu, M.L. Cohen, Phys. Rev. B. 41 (1990) 10727.
- (1990) Phys. Rev. B. , vol.41 , pp. 10727
- Liu, A.Y.¹ Cohen, M.L.²

4
- 84907009269
- K.J. Boyd, D. Marton, S.S. Todorov, A.H. Al-Bayati, J. Kulik, R.A. Zuhr, J.W. Rabalais, J. Vac. Sci. Technol. A 13 (4) (1995) 2110.
- (1995) J. Vac. Sci. Technol. A , vol.13 , Issue.4 , pp. 2110
- Boyd, K.J.¹ Marton, D.² Todorov, S.S.³ Al-Bayati, A.H.⁴ Kulik, J.⁵ Zuhr, R.A.⁶ Rabalais, J.W.⁷

5
- 84957284270
- M.Y. Chen, X. Lin, V.P. Dravid, Y.W. Chung, M.S. Wong, W.D. Sproul, Surf. Coat. Technol. 54/55 (1992) 360.
- (1992) Surf. Coat. Technol. , vol.54-55 , pp. 360
- Chen, M.Y.¹ Lin, X.² Dravid, V.P.³ Chung, Y.W.⁴ Wong, M.S.⁵ Sproul, W.D.⁶

6
- 0031212446
- M.A. Baker, P. Hammer, Surf. Interf. Anal. 25 (1997) 629.
- (1997) Surf. Interf. Anal. , vol.25 , pp. 629
- Baker, M.A.¹ Hammer, P.²

7
- 0001548543
- J.H. Kaufman, S. Metin, D.D. Saperstein, Phys. Rev. B 39 (18) (1989) 13053.
- (1989) Phys. Rev. B , vol.39 , Issue.18 , pp. 13053
- Kaufman, J.H.¹ Metin, S.² Saperstein, D.D.³

8
- 0003691125
- J. Wiley and Sons, New York
- D. Dolphin, A. Wick, Tabulation of Infrared Spectral Data, J. Wiley and Sons, New York, 1977.
- (1977) Tabulation of Infrared Spectral Data
- Dolphin, D.¹ Wick, A.²

9
- 0003735814
- J. Wiley and Sons, Chichester, UK
- G. Socrates, Infrared Characteristic Group Frequencies, J. Wiley and Sons, Chichester, UK, 1980.
- (1980) Infrared Characteristic Group Frequencies
- Socrates, G.¹

10
- 0342945364
- H. Sjöström, S. Stafström, M. Boman, J.E. Sundgren, Phys. Rev. Lett. 75 (1995) 1336.
- (1995) Phys. Rev. Lett. , vol.75 , pp. 1336
- Sjöström, H.¹ Stafström, S.² Boman, M.³ Sundgren, J.E.⁴

11
- 0000827175
- J.E. Houston, J.W. Rogers, R.R. Rye, F.L. Hutson, D.E. Ramaker, Phys. Rev. B 34 (1986) 1215.
- (1986) Phys. Rev. B , vol.34 , pp. 1215
- Houston, J.E.¹ Rogers, J.W.² Rye, R.R.³ Hutson, F.L.⁴ Ramaker, D.E.⁵

12
- 0001374688
- H.J. Steffen, C.D. Roux, D. Marton, J.W. Rabalais, Phys. Rev. B 44 (1991) 3981.
- (1991) Phys. Rev. B , vol.44 , pp. 3981
- Steffen, H.J.¹ Roux, C.D.² Marton, D.³ Rabalais, J.W.⁴

13
- 37049143599
- L.L. Bircumshaw, F.M. Tayler, D.H. Whiffen, J. Chem. Soc. (1954) 931.
- (1954) J. Chem. Soc. , pp. 931
- Bircumshaw, L.L.¹ Tayler, F.M.² Whiffen, D.H.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.