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Materials Research Society Symposium - Proceedings

Volumn 609, Issue , 2000, Pages

Growth processes of hydrogenated amorphous silicon

(1) Robertson, J a

a UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CRYSTAL DEFECTS; CRYSTAL GROWTH; HYDROGENATION; ION BOMBARDMENT; LOW TEMPERATURE EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

ION ENERGY DISTRIBUTION; PLASMA DENSITY REACTORS;

AMORPHOUS SILICON;

EID: 0034431055 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-609-a1.4 Document Type: Conference Paper

Times cited : (14)

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