SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 596, Issue , 2000, Pages 11-23

Integration issues of (Ba,Sr)TiO3 thin films in high density devices

(10) Yoo, C Y a Park, H B a Hwang, D S a Hideki, H a Kim, W D a Lim, H J a Lee, B T a Park, Y W a Lee, S I a Lee, M Y a

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; CAPACITORS; ELECTRODES; ELECTROPLATING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDATION; PERMITTIVITY; PLATINUM; SPUTTER DEPOSITION; TERNARY SYSTEMS; TITANIUM ALLOYS;

BARIUM STRONTIUM TITANATE; HIGH DENSITY DEVICES; REACTIVE SPUTTERING;

THIN FILMS;

EID: 0033695352 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (4)

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