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Volumn , Issue , 1998, Pages 815-818

Integration processes of (Ba,Sr)TiO3 capacitor for 1 Gb and beyond

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BARIUM TITANATE; CAPACITANCE; ELECTROCHEMICAL ELECTRODES; LEAKAGE CURRENTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PLATINUM; STRONTIUM COMPOUNDS;

EID: 0032256944     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (13)

References (3)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.