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Volumn , Issue , 1998, Pages 815-818
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Integration processes of (Ba,Sr)TiO3 capacitor for 1 Gb and beyond
a a a a a a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
BARIUM TITANATE;
CAPACITANCE;
ELECTROCHEMICAL ELECTRODES;
LEAKAGE CURRENTS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
PLATINUM;
STRONTIUM COMPOUNDS;
CONCAVE-TYPE CAPACITORS;
CAPACITORS;
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EID: 0032256944
PISSN: 01631918
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (13)
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References (3)
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