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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 2 PART A, 1996, Pages 729-735

Thermal desorption spectroscopy of (Ba, Sr)TiO3 thin filins prepared by chemical vapor deposition

(5) Yamamuka, Mikio a Kawahara, Takaaki a Makita, Tetsuro a Yuuki, Akimasa a Ono, Kouichi a

a MITSUBISHI ELECTRIC CORPORATION (Japan)

Author keywords

(Ba, Sr)TiO3; BaCO3; CVD; Dielectric constant; Dielectric loss tangent; DRAM; LSI; Perovskite crystalline; SrCO3; Thermal desorption spectroscopy

Indexed keywords

BARIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; FILM PREPARATION; LSI CIRCUITS; MORPHOLOGY; PERMITTIVITY; RANDOM ACCESS STORAGE; SPECTROSCOPY; STRONTIUM COMPOUNDS; SURFACES; TITANIUM OXIDES;

ATOMIC COMPOSITION; BARIUM CARBONATES; DIELECTRIC LOSS TANGENT; DYNAMIC RANDOM ACCESS MEMORIES; PEROVSKITE CRYSTALLINE STRUCTURE; STRONTIUM CARBONATES; THERMAL DESORPTION SPECTROSCOPY;

THIN FILMS;

EID: 0030083799 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.35.729 Document Type: Article

Times cited : (19)

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