All perovskite Capacitor (APEC) technology for (Ba, Sr)TiO3 capacitor scaling toward 0.10 μm stacked DRAMs

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 807-810

  Hieda, K ^a   Eguchi, K ^a   Fukushima, N ^a   Aoyama, T ^a   Natori, K ^a   Kiyotoshi, M ^a   Yamazaki, S ^a   Izuha, M ^a   Niwa, S ^a   Fukuzumi, Y ^a   Ishibashi, Y ^a   Kohyama, Y ^a   Arikado, T ^a   Okumura, K ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; CHEMICAL VAPOR DEPOSITION; DIELECTRIC FILMS; DYNAMIC RANDOM ACCESS STORAGE; ELECTROCHEMICAL ELECTRODES; LEAKAGE CURRENTS; PEROVSKITE; POLYCRYSTALLINE MATERIALS; STRONTIUM COMPOUNDS; THERMAL EFFECTS;

ALL PEROVSKITE CAPACITOR (APEC) TECHNOLOGY;

CAPACITORS;

EID: 0032256582     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)