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Volumn 26, Issue 6, 1998, Pages 1592-1609

Quasi-neutral particle simulation of magnetized plasma discharges: General formalism and application to ECR discharges

Author keywords

Electron cyclotron resonance plasma; Particle simulation; Particlein cell simulation; Plasma simulation; Quasineutral plasma

Indexed keywords

ARGON; BOUNDARY CONDITIONS; COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTRON CYCLOTRON RESONANCE; MATHEMATICAL MODELS; MONTE CARLO METHODS; PLASMA OSCILLATIONS; PLASMA SIMULATION;

EID: 0032308311     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.747877     Document Type: Article
Times cited : (38)

References (61)
  • 11
    • 85177122560 scopus 로고    scopus 로고
    • 2-D particle-in-cell simulation of an electron-cyclotron-resonance etching tool," J. Appl. Phys., vol. 78, pp. 2270-2278, Aug. 1995.
    • K. A. Ashtiani, J. L Shohet, W. N. G. Hitchon, G.-H. Kirn, and N. Hershkowitz, "A 2-D particle-in-cell simulation of an electron-cyclotron-resonance etching tool," J. Appl. Phys., vol. 78, pp. 2270-2278, Aug. 1995.
    • J. L Shohet, W. N. G. Hitchon, G.-H. Kirn, and N. Hershkowitz, "A
    • Ashtiani, K.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.