Numerical Modeling of Low-Pressure RF Plasmas

IEEE Transactions on Plasma Science

Volumn 18, Issue 4, 1990, Pages 725-732

  Vender, David ^a   Boswell, Rod W ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL TECHNIQUES--FINITE DIFFERENCE METHOD;

CHARGE-EXCHANGE COLLISIONS; ION ENERGY SPECTRUM; ION MASS; NONPERIODIC BOUNDARY CONDITIONS; PARTICLE-IN-CELL SIMULATION; RF PLASMAS;

PLASMAS;

EID: 0025468437     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.57527     Document Type: Article

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