Self-consistent simulation of a parallel-plate rf discharge

Applied Physics Letters

Volumn 52, Issue 1, 1988, Pages 21-23

  Boswell, R W ^a   Morey, I J ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002411669     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.99327     Document Type: Article

References (7)