Faraday rotation of microwave fields in an electron cyclotron resonance plasma

IEEE Transactions on Plasma Science

Volumn 24, Issue 1, 1996, Pages 16-17

  Douglass, Scott R ^a   Eddy Jr , Charles ^a   Weber, Bruce V ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTRIC VARIABLES MEASUREMENT; ELECTROMAGNETIC WAVE POLARIZATION; ELECTROMAGNETIC WAVE PROPAGATION; ELECTRON CYCLOTRON RESONANCE; FARADAY EFFECT; MAGNETIC FIELDS; MAGNETOPLASMA; MAGNETRONS; MICROWAVES; ROTATION;

COLD PLASMA DISPERSION THEORY; ELECTRON CYCLOTRON RESONANCE PLASMA; FARADAY ROTATION; MICROWAVE FIELDS; POLARIZATION ELLIPSE; QUARTZ ENTRY WINDOW;

ELECTROMAGNETIC FIELDS;

EID: 0030083007     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.491668     Document Type: Article

References (2)

1. J. E. Stevens, Y. C. Huang, R. L. Jarecki, and J. L. Cecchi, "Plasma uniformity and power deposition in electron cyclotron resonance etch tools," J. Vacuum Sci. Technol A, vol. 10, no. 4, pp. 1270-1275, July/Aug. 1992.
2. O. A. Popov, "Effects of magnetic field and microwave power on electron cyclotron resonance-type plasma characteristics," J. Vacuum Sci. Technol. A, vol. 9, no. 3, pp. 711-716, May/June 1991.