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Volumn 56, Issue 11, 1990, Pages 1022-1024
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Electron heating in low-pressure rf glow discharges
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000226376
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.102604 Document Type: Article |
Times cited : (115)
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References (27)
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