Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. I: Analysis of numerical techniques

Plasma Sources Science and Technology

Volumn 2, Issue 4, 1993, Pages 261-272

  Vahedi, V ^a   Dipeso, G ^b   Birdsall, C K ^a   Lieberman, M A ^a   Rognlien, T D ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001643288     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/2/4/006     Document Type: Article

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