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Volumn 23, Issue 4, 1995, Pages 602-608

Three-Dimensional Electromagnetic PIC Model of a Compact ECR Plasma Source

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DISTRIBUTED COMPUTER SYSTEMS; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC WAVE ABSORPTION; ELECTROMAGNETIC WAVE REFLECTION; ELECTRON CYCLOTRON RESONANCE; FINITE DIFFERENCE METHOD; MATHEMATICAL MODELS; PLASMA SIMULATION; THREE DIMENSIONAL; TIME DOMAIN ANALYSIS;

EID: 0029354372     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.467980     Document Type: Article
Times cited : (21)

References (23)
  • 1
    • 0026141135 scopus 로고
    • Modeling and simulation of magnetically confined low-pressure plasmas in two-dimensions
    • R. K. Porteous and D. B. Graves, “Modeling and simulation of magnetically confined low-pressure plasmas in two-dimensions,” IEEE Trans. Plasma Sci., vol. 19, pp. 204–213, 1991.
    • (1991) IEEE Trans. Plasma Sci. , vol.19 , pp. 204-213
    • Porteous, R.K.1    Graves, D.B.2
  • 2
    • 0001209405 scopus 로고
    • Modeling of plasma flow downstream of an electron cyclotron resonance plasma source
    • M. Hussein and G. A. Emmert, “Modeling of plasma flow downstream of an electron cyclotron resonance plasma source,” J. Vac. Sci. Technol. A, vol. 8, pp. 2913–2918, 1990.
    • (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 2913-2918
    • Hussein, M.1    Emmert, G.A.2
  • 3
    • 0002678226 scopus 로고
    • Electron energy distributions in electron cyclotron resonance discharges for materials processing
    • Y. Weng and M. J. Kushner, “Electron energy distributions in electron cyclotron resonance discharges for materials processing,” J. Appl. Phys., vol. 72, pp. 33–42, 1992.
    • (1992) J. Appl. Phys. , vol.72 , pp. 33-42
    • Weng, Y.1    Kushner, M.J.2
  • 4
    • 0027617780 scopus 로고
    • Modeling and simulation of high density plasmas
    • D. B. Graves, H. Wu, and R. K. Porteous, “Modeling and simulation of high density plasmas,” Japan J. Appl. Phys., vol. 32, pp. 2999–3006, 1993.
    • (1993) Japan J. Appl. Phys. , vol.32 , pp. 2999-3006
    • Graves, D.B.1    Wu, H.2    Porteous, R.K.3
  • 5
    • 84894021661 scopus 로고
    • Numerical solution of initial boundary value problems involving Maxwell's equations in isotropic media
    • K. S. Yee, “Numerical solution of initial boundary value problems involving Maxwell's equations in isotropic media,” IEEE Trans. Antennas Propagat., vol. 14, pp. 302–307, 1966.
    • (1966) IEEE Trans. Antennas Propagat. , vol.14 , pp. 302-307
    • Yee, K.S.1
  • 6
    • 0000833116 scopus 로고
    • Numerical modeling of a compact ECR ion source
    • T. A. Grotjohn, “Numerical modeling of a compact ECR ion source,” Rev. Sci. Instrum., vol. 63, pp. 2535–2537, 1992.
    • (1992) Rev. Sci. Instrum. , vol.63 , pp. 2535-2537
    • Grotjohn, T.A.1
  • 7
    • 21344481996 scopus 로고
    • Modeling the electromagnetic excitation of a microwave cavity plasma reactor
    • W. Tan and T. A. Grotjohn, “Modeling the electromagnetic excitation of a microwave cavity plasma reactor,” J. Vac. Sci. Technol. A, vol. 12, pp. 1216–1220, 1994.
    • (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1216-1220
    • Tan, W.1    Grotjohn, T.A.2
  • 8
    • 0004864351 scopus 로고
    • Modeling the electromagnetic excitation of a compact ECR ion/free radical source
    • T. A. Grotjohn, W. Tan, V. Gopinath, A. K. Srivastava, and J. Asmussen, “Modeling the electromagnetic excitation of a compact ECR ion/free radical source,” Rev. Sci. Instrum., vol. 65, pp. 1761–1765, 1994.
    • (1994) Rev. Sci. Instrum. , vol.65 , pp. 1761-1765
    • Grotjohn, T.A.1    Tan, W.2    Gopinath, V.3    Srivastava, A.K.4    Asmussen, J.5
  • 9
    • 0026945239 scopus 로고
    • A particle-tracking method for 3D electromagnetic PIC codes on unstructured meshes
    • F. Assous, P. Degond, and J. Segre, “A particle-tracking method for 3D electromagnetic PIC codes on unstructured meshes,” Computer Physics Commun., vol. 72, pp. 105–114, 1992.
    • (1992) Computer Physics Commun. , vol.72 , pp. 105-114
    • Assous, F.1    Degond, P.2    Segre, J.3
  • 10
    • 84936899663 scopus 로고    scopus 로고
    • 3D electromagnetic plasma particle simulations on a MTMD parallel computer
    • to be published
    • J. Wang, P. Leiwer, and V. Decyk, “3D electromagnetic plasma particle simulations on a MTMD parallel computer,” Computer Physics Commun., to be published.
    • Computer Physics Commun.
    • Wang, J.1    Leiwer, P.2    Decyk, V.3
  • 12
    • 0025377112 scopus 로고
    • A parallel particle-in-cell model for the massively parallel processor
    • C. S. Lin, A. L. Thring, J. Koga, and E. J. Seiler, “A parallel particle-in-cell model for the massively parallel processor,” J. Parallel Distributed Computing, vol. 8, pp. 196–199, 1990.
    • (1990) J. Parallel Distributed Computing , vol.8 , pp. 196-199
    • Lin, C.S.1    Thring, A.L.2    Koga, J.3    Seiler, E.J.4
  • 13
    • 0001421577 scopus 로고
    • A general concurrent algorithm for plasma particle-in-cell simulation codes
    • P. C. Liewer and V. K. Decyk, “A general concurrent algorithm for plasma particle-in-cell simulation codes,” J. Comp. Phys., vol. 85, pp. 302–322, 1989.
    • (1989) J. Comp. Phys. , vol.85 , pp. 302-322
    • Liewer, P.C.1    Decyk, V.K.2
  • 15
  • 16
    • 83455249023 scopus 로고
    • Electron cyclotron resonance microwave discharges for etching and thin-film deposition
    • J. Asmussen, “Electron cyclotron resonance microwave discharges for etching and thin-film deposition,” J. Vac. Sci. Technol. A, vol. 7, pp. 883–893, 1989.
    • (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 883-893
    • Asmussen, J.1
  • 17
    • 0016544968 scopus 로고
    • Numerical solution of steady-state electromagnetic scattering problems using the time-dependent Maxwell's equations
    • A. Taflove and M. E. Brodwin, “Numerical solution of steady-state electromagnetic scattering problems using the time-dependent Maxwell's equations,” IEEE Trans. Microwave Theory Tech., vol. 23, pp. 623–630, 1975.
    • (1975) IEEE Trans. Microwave Theory Tech. , vol.23 , pp. 623-630
    • Taflove, A.1    Brodwin, M.E.2
  • 19
    • 0002300781 scopus 로고
    • A method for incorporating Gauss's law into electromagnetic PIC codes
    • B. Marder, “A method for incorporating Gauss's law into electromagnetic PIC codes,” J. Comp. Phys., vol. 68, pp. 48–55, 1987.
    • (1987) J. Comp. Phys. , vol.68 , pp. 48-55
    • Marder, B.1
  • 20
    • 28144455997 scopus 로고
    • An analysis and optimization of the pseudo-current method
    • D. E. Nielsen, Jr. and A. D. Drobot, “An analysis and optimization of the pseudo-current method,” J. Comp. Phys., vol. 89, pp. 31–40, 1990.
    • (1990) J. Comp. Phys. , vol.89 , pp. 31-40
    • Nielsen, D.E.1    Drobot, A.D.2
  • 23
    • 11644251130 scopus 로고
    • Measurements of the impressed electric field inside a coaxial electron cyclotron resonance plasma source
    • A. K. Srivastava and J. Asmussen, “Measurements of the impressed electric field inside a coaxial electron cyclotron resonance plasma source,” Rev. Sci. Instrum., vol. 66, pp. 1028–1034, 1995.
    • (1995) Rev. Sci. Instrum. , vol.66 , pp. 1028-1034
    • Srivastava, A.K.1    Asmussen, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.