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Volumn 69, Issue 24, 1992, Pages 3511-3514
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Anomalous sheath heating in a low pressure rf discharge in nitrogen
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000098764
PISSN: 00319007
EISSN: None
Source Type: Journal
DOI: 10.1103/PhysRevLett.69.3511 Document Type: Article |
Times cited : (111)
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References (18)
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