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Volumn 19, Issue 2, 1991, Pages 204-213

Modeling and Simulation of Magnetically Confined Low-Pressure Plasmas in Two Dimensions

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MAGNETIC FIELDS; MATHEMATICAL MODELS;

EID: 0026141135     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.106815     Document Type: Article
Times cited : (64)

References (38)
  • 1
    • 0000210963 scopus 로고
    • Reactive ion stream etching utilizing electron cyclotron resonance plasma
    • T. Ono, M. Oda, C. Takahashi, and S. Matsuo “Reactive ion stream etching utilizing electron cyclotron resonance plasma,” J. Vac. Sci. Technol., vol. B4, no. 3, pp. 696–700, 1986.
    • (1986) J. Vac. Sci. Technol , vol.B4 , Issue.3 , pp. 696-700
    • Ono, T.1    Oda, M.2    Takahashi, C.3    Matsuo, S.4
  • 2
    • 0023963419 scopus 로고
    • Microwave multipolar plasma for etching and deposition
    • Feb.
    • R. R. Burke and C. Pomot, “Microwave multipolar plasma for etching and deposition,” Solid State Technol., pp. 67–71, Feb. 1988.
    • (1988) Solid State Technol , pp. 67-71
    • Burke, R.R.1    Pomot, C.2
  • 3
    • 0001570702 scopus 로고
    • Plasma characterization for a divergent field electron cyclotron resonance source
    • J. Forster and W. M. Holber, “Plasma characterization for a divergent field electron cyclotron resonance source,” J. Vac. Sci, Technol. vol. A7, no. 3, pp. 899–902, 1989.
    • (1989) J. Vac. Sci, Technol , vol.A7 , Issue.3 , pp. 899-902
    • Forster, J.1    Holber, W.M.2
  • 4
    • 83455249023 scopus 로고
    • Electron cyclotron resonance microwave discharges for etching and thin-film deposition
    • J. Asmussen, “Electron cyclotron resonance microwave discharges for etching and thin-film deposition,” J. Vac. Sci Technol, vol. A7, no. 3, pp. 883–893, 1989.
    • (1989) J. Vac. Sci Technol , vol.A7 , Issue.3 , pp. 883-893
    • Asmussen, J.1
  • 5
    • 84951368205 scopus 로고
    • Characteristics of electron cyclotron resonance plasma sources
    • O. A. Popov, “Characteristics of electron cyclotron resonance plasma sources,” J. Vac. Sci. Technol., vol. A7, no. 3, pp. 894–898, 1989.
    • (1989) J. Vac. Sci. Technol , vol.A7 , Issue.3 , pp. 894-898
    • Popov, O.A.1
  • 6
    • 84957281412 scopus 로고
    • Electron cyclotron resonance plasma stream source for plasma enhanced chemical vapor deposition
    • O. A. Popov and H. Waldron, “Electron cyclotron resonance plasma stream source for plasma enhanced chemical vapor deposition,” J. Vac. Sci. Technol. vol. A7, no. 3, pp. 914–917, 1989.
    • (1989) J. Vac. Sci. Technol , vol.A7 , Issue.3 , pp. 914-917
    • Popov, O.A.1    Waldron, H.2
  • 7
    • 0022706010 scopus 로고
    • A continuum model of dc and RF discharges
    • D. B. Graves and K. F. Jensen, “A continuum model of dc and RF discharges,” IEEE Trans. Plasma Sci., vol. PS-14, pp. 78–91, 1986.
    • (1986) IEEE Trans. Plasma Sci , vol.PS-14 , pp. 78-91
    • Graves, D.B.1    Jensen, K.F.2
  • 8
    • 0000048243 scopus 로고
    • Numerical model of RF glow discharge
    • J. P. Boeuf, “Numerical model of RF glow discharge,” Phys. Rev. A, vol. 36, no. 6, pp. 2782–2792, 1987.
    • (1987) Phys. Rev. A , vol.36 , Issue.6 , pp. 2782-2792
    • Boeuf, J.P.1
  • 9
    • 0000980672 scopus 로고
    • Comparison of experimental measurements and model predictions for radio-frequency frequency Ar and SF6 discharges
    • E. Gogolides, J. P. Nicolai, and H. H. Sawin, “Comparison of experimental measurements and model predictions for radio-frequency frequency Ar and SF 6 discharges,” J. Vac. Sci. Technol., vol. A7, no. 3, 1001–1005, 1989.
    • (1989) J. Vac. Sci. Technol , vol.A7 , Issue.3 , pp. 1001-1005
    • Gogolides, E.1    Nicolai, J.P.2    Sawin, H.H.3
  • 11
    • 0002411669 scopus 로고
    • Self-consistent simulation of a parallel-plate discharge
    • R. W. Boswell and I. J. Morey, “Self-consistent simulation of a parallel-plate discharge,” Appl. Phys. Lett., vol. 52, no. 1, pp. 21–23, 1988.
    • (1988) Appl. Phys. Lett , vol.52 , Issue.1 , pp. 21-23
    • Boswell, R.W.1    Morey, I.J.2
  • 12
    • 4143066259 scopus 로고
    • Electron heating mechanisms in helium RF glow discharges: A self-consistent kinetic calculation
    • T. J. Sommerer, W. N. G. Hitchon, and J. E. Lawler, “Electron heating mechanisms in helium RF glow discharges: A self-consistent kinetic calculation,” Phys. Rev. Lett., vol. 63, no. 21, pp. 2361–2364, 1989.
    • (1989) Phys. Rev. Lett , vol.63 , Issue.21 , pp. 2361-2364
    • Sommerer, T.J.1    Hitchon, W.N.G.2    Lawler, J.E.3
  • 13
    • 0000226376 scopus 로고
    • Electron heating in low-pressure RF glow discharges
    • M. Surendra, D. B. Graves, and I. J. Morey, “Electron heating in low-pressure RF glow discharges,” Appl. Phys. Lett., vol. 56, no. 11, 1022–1024, 1990.
    • (1990) Appl. Phys. Lett , vol.56 , Issue.11 , pp. 1022-1024
    • Surendra, M.1    Graves, D.B.2    Morey, I.J.3
  • 14
    • 0025468437 scopus 로고
    • Numerical modeling of low-pressure pressure RF plasmas
    • Aug.
    • D. Vender and R. W. Boswell, “Numerical modeling of low-pressure pressure RF plasmas,” IEEE Trans. Plasma Sci., vol. 18, pp. 725–732, Aug. 1990.
    • (1990) IEEE Trans. Plasma Sci , vol.18 , pp. 725-732
    • Vender, D.1    Boswell, R.W.2
  • 15
    • 0026140546 scopus 로고    scopus 로고
    • Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC
    • this issue
    • C. K. Birdsall, “Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC,” IEEE Trans. Plasma Sci., this issue, 65–85.
    • IEEE Trans. Plasma Sci , pp. 65-85
    • Birdsall, C.K.1
  • 16
    • 0026137242 scopus 로고    scopus 로고
    • Particle simulations of radio-frequency frequency glow discharges
    • this issue
    • M. Surendra and D. B. Graves, “Particle simulations of radio-frequency frequency glow discharges,” IEEE Trans. Plasma Sci., this issue, pp. 144–157.
    • IEEE Trans. Plasma Sci , pp. 144-157
    • Surendra, M.1    Graves, D.B.2
  • 17
    • 0002327373 scopus 로고
    • Magnetic field gradient effects on ion energy for electron cyclotron resonance microwave plasma stream
    • M. Matsuoka and K. Ono, “Magnetic field gradient effects on ion energy for electron cyclotron resonance microwave plasma stream,” J. Vac. Sci. Technol. vol. A6, no. 1, 25–29, 1988.
    • (1988) J. Vac. Sci. Technol , vol.A6 , Issue.1 , pp. 25-29
    • Matsuoka, M.1    Ono, K.2
  • 18
    • 0001753475 scopus 로고
    • Plasma characterization of an electron cyclotron resonance-radio frequency hybrid plasma reactor
    • Y. H. Lee, J. E. Heidenreich III, and G. Fortuno, “Plasma characterization of an electron cyclotron resonance-radio frequency hybrid plasma reactor,” J. Vac. Sci. Technol., vol. A7, no. 3, pp. 903–907, 1989.
    • (1989) J. Vac. Sci. Technol , vol.A7 , Issue.3 , pp. 903-907
    • Lee, Y.H.1    Heidenreich, J.E.2    Fortuno, G.3
  • 19
    • 0001739922 scopus 로고
    • Ion energetics in ECR discharges
    • W. M. Holber and J. Forster, “Ion energetics in ECR discharges,” J. Vac. Sci. Technol., vol. 8, no. 5, 3720–3725, 1990.
    • (1990) J. Vac. Sci. Technol , vol.8 , Issue.5 , pp. 3720-3725
    • Holber, W.M.1    Forster, J.2
  • 20
    • 0343351314 scopus 로고
    • Spatially resolved ion velocity distributions in a diverging field electron-cyclotron resonance plasma reactor
    • D. J. Trevor et al, “Spatially resolved ion velocity distributions in a diverging field electron-cyclotron resonance plasma reactor,” Appl. Lett., vol. 57, no. 12, 1188–1190, 1990.
    • (1990) Appl. Lett , vol.57 , Issue.12 , pp. 1188-1190
    • Trevor, D.J.1
  • 21
    • 36549102621 scopus 로고
    • Laser-induced fluorescence measurements of transverse ion temperature in an electron-cyclotron resonance plasma
    • E. A. Den Hartog, H. Pershing, and R. C. Woods, “Laser-induced fluorescence measurements of transverse ion temperature in an electron-cyclotron resonance plasma,” Appl. Phys. Lett., vol. 57, no. 7, 661–663, 1990.
    • (1990) Appl. Phys. Lett , vol.57 , Issue.7 , pp. 661-663
    • Den Hartog, E.A.1    Pershing, H.2    Woods, R.C.3
  • 22
    • 36849103270 scopus 로고
    • Static theory of a discharge column at intermediate pressures
    • S. A. Self and H. N. Ewald, “Static theory of a discharge column at intermediate pressures,” Phys. Fluids, vol. 9, no. 12, pp. 2486–2492, 1966.
    • (1966) Phys. Fluids , vol.9 , Issue.12 , pp. 2486-2492
    • Self, S.A.1    Ewald, H.N.2
  • 23
    • 36149018208 scopus 로고
    • A general theory of the plasma of an arc
    • L. Tonks and I. Langmuir, “A general theory of the plasma of an arc,” Phys. Rev., vol. 34, 876–927, 1929.
    • (1929) Phys. Rev , vol.34 , pp. 876-927
    • Tonks, L.1    Langmuir, I.2
  • 24
    • 0001047410 scopus 로고
    • Diffusionstheorie der positiven Saule
    • W. Schottky, “Diffusionstheorie der positiven Saule,” Physik Z., vol. 25, pp. 635–640, 1924.
    • (1924) Physik Z , vol.25 , pp. 635-640
    • Schottky, W.1
  • 25
    • 36849138081 scopus 로고
    • Inertia-controlled ambipolar diffusion
    • K. B. Persson, “Inertia-controlled ambipolar diffusion,” Phys. Fluids, vol. 5, no. 12, 1625–1632, 1962.
    • (1962) Phys. Fluids , vol.5 , Issue.12 , pp. 1625-1632
    • Persson, K.B.1
  • 26
    • 0011255503 scopus 로고
    • Two-dimensional low-pressure discharge theory
    • G. S. Kino and E. K. Shaw, “Two-dimensional low-pressure discharge theory,” Phys. Fluids, vol. 9, no. 3, 587–593, 1966.
    • (1966) Phys. Fluids , vol.9 , Issue.3 , pp. 587-593
    • Kino, G.S.1    Shaw, E.K.2
  • 27
    • 5844236171 scopus 로고
    • Steady-state theory of a low-pressure discharge column in an axial magnetic field
    • S. A. Self, “Steady-state theory of a low-pressure discharge column in an axial magnetic field,” Phys. Fluids, vol. 10, no. 7, pp. 1569–1576, 1967.
    • (1967) Phys. Fluids , vol.10 , Issue.7 , pp. 1569-1576
    • Self, S.A.1
  • 28
    • 0015665728 scopus 로고
    • Theory of a steady-state nonisothermal positive column in a magnetic field
    • D. B. Illic, “Theory of a steady-state nonisothermal positive column in a magnetic field,” J. Appl. Phys., vol. 44, no. 9, pp. 3993–4001, 1973.
    • (1973) J. Appl. Phys , vol.44 , Issue.9 , pp. 3993-4001
    • Illic, D.B.1
  • 29
    • 0001209405 scopus 로고
    • Collisional effects on plasma flow along the divergent magnetic field of an ECR plasma stream source
    • Palo Alto, CA, Oct. see also, J. Vac. Sci. Technol.
    • M. Hussein and G. A. Emmert, “Collisional effects on plasma flow along the divergent magnetic field of an ECR plasma stream source,” presented at the 42nd Gaseous Electron. Conf., Palo Alto, CA, Oct. 1989; see also, J. Vac. Sci. Technol., vol. 8A, no. 3, pp. 2913–2918, 1990.
    • (1989) presented at the 42nd Gaseous Electron. Conf , vol.8A , Issue.3 , pp. 2913-2918
    • Hussein, M.1    Emmert, G.A.2
  • 30
    • 0009900639 scopus 로고
    • Optics of ion beams of arbitrary perveance extracted from a plasma
    • J. H. Whealton, E. F. Jaeger, and J. C. Whitson, “Optics of ion beams of arbitrary perveance extracted from a plasma,” J. Comp. Phys., vol. 27, pp. 32–41, 1978.
    • (1978) J. Comp. Phys , vol.27 , pp. 32-41
    • Whealton, J.H.1    Jaeger, E.F.2    Whitson, J.C.3
  • 31
    • 30244542248 scopus 로고
    • Ion extraction and optics arithmetic
    • J. H. Whealton, “Ion extraction and optics arithmetic,” Nucl. Instrum. strum. Methods, vol. 189, pp. 55–70, 1981.
    • (1981) Nucl. Instrum. strum. Methods , vol.189 , pp. 55-70
    • Whealton, J.H.1
  • 33
    • 0001368721 scopus 로고
    • Elastic and inelastic scattering of low-velocity ions: Ne+ in A, A+ in Ne, and A+ in A
    • W. H. Cramer, “Elastic and inelastic scattering of low-velocity ions: Ne + in A, A + in Ne, and A + in A,” J. Chem. Phys., vol. 64, pp. 641–642, 1959.
    • (1959) J. Chem. Phys , vol.64 , pp. 641-642
    • Cramer, W.H.1
  • 34
    • 36149021134 scopus 로고
    • Ambipolar diffusion in a magnetic field
    • A. Simon, “Ambipolar diffusion in a magnetic field,” Phys. Rev., vol. 98, no. 2, pp. 317–318, 1955.
    • (1955) Phys. Rev , vol.98 , Issue.2 , pp. 317-318
    • Simon, A.1
  • 36
    • 0001261432 scopus 로고
    • Total cross sections for electron scattering by Ne, A, Kr, and Xe
    • F. J. de Heer, R. H. J. Jansen, and W. van der Kaay, “Total cross sections for electron scattering by Ne, A, Kr, and Xe,” J. Phys. B, vol. 12, pp. 979–1002, 1979.
    • (1979) J. Phys. B , vol.12 , pp. 979-1002
    • De Heer, F.J.1    Jansen, R.H.J.2    Van Der Kaay, W.3
  • 37
    • 30844450637 scopus 로고
    • Total cross section for ionization and attachment in gases by electron impact. I: Positive ionization
    • D. Rapp and P. E. Golden, “Total cross section for ionization and attachment in gases by electron impact. I: Positive ionization,” J. Chem. Phys., vol. 43, pp. 1464–1479, 1965.
    • (1965) J. Chem. Phys , vol.43 , pp. 1464-1479
    • Rapp, D.1    Golden, P.E.2


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