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Volumn 32, Issue 6 S, 1993, Pages 2999-3006
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Modeling and simulation of high density plasmas
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Author keywords
Electron cyclotron resonance; High density plasma sources; Plasma simulation
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Indexed keywords
CYCLOTRON RESONANCE;
ELECTRON RESONANCE;
MATHEMATICAL MODELS;
MICROWAVES;
PLASMA SOURCES;
SIMULATION;
ECR PLASMA;
HIGH DENSITY PLASMA;
MICROWAVE POWER;
PLASMAS;
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EID: 0027617780
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.32.2999 Document Type: Article |
Times cited : (35)
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References (30)
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