Advanced technologies for optimized sub-quarter-micrometer soi cmos devices

IEEE Transactions on Electron Devices

Volumn 45, Issue 5, 1998, Pages 1092-1098

  Hsiao, Tommy C ^a   Liu, Ping ^b   Woo, Jason C S ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b ADVANCED MICRO DEVICES   (United States)

^c INTEGRATED DEVICE TECHNOLOGY INC   (United States)

Author keywords

CMOS; Silicon on insulator technology

Indexed keywords

AMORPHIZATION; CMOS INTEGRATED CIRCUITS; GATES (TRANSISTOR); MOSFET DEVICES; SEMICONDUCTING FILMS; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DOPING;

FLOATING BODY EFFECTS; SILICIDE;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0032069643     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.669541     Document Type: Article

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