OPTIMIZATION OF SERIES RESISTANCE IN SUB-0.2 μm SOI MOSFETs

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1993, Pages 723-726

  Su, Lisa T ^a   Sherony, Melanie J ^a   Hu, Hang ^a   Chung, James E ^a   Antoniadis, Dimitri A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; MOSFET DEVICES; ULTRATHIN FILMS; MATHEMATICAL MODELS; OPTIMIZATION; SILICON; SIMULATION; THIN FILM CIRCUITS;

OPTIMISATIONS; PERFORMANCE; SALICIDATION TECHNOLOGY; SERIES RESISTANCES; SOI-MOSFETS; THIN-FILMS; ULTRA-THIN FILM;

SILICIDES; MOSFET DEVICES;

LAMINATES; SERIES RESISTANCE; SILICON ON INSULATOR (SOI);

EID: 0027867603     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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