SCOPUS 정보 검색 플랫폼

Volumn 74, Issue 12, 1999, Pages 1752-1754

Non-Arrhenius temperature dependence of reliability in ultrathin silicon dioxide films

Author keywords

[No Author keywords available]

Indexed keywords

PROBABILITY; SEMICONDUCTING SILICON COMPOUNDS; SILICA; THERMAL EFFECTS; ULTRATHIN FILMS;

NON-ARRHENIUS TEMPERATURE DEPENDENCE;

SEMICONDUCTING FILMS;

EID: 0032614265 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.123677 Document Type: Article

Times cited : (113)

References (10)

1
- 0344613926
- ECS, Princeton, NJ
- T. Kubota, P. Apte, and K. C. Saraswat, in 1992 ECS Spring Meeting Extended Abstracts (ECS, Princeton, NJ, 1992), pp. 424 and 425.
- (1992) 1992 ECS Spring Meeting Extended Abstracts , pp. 424
- Kubota, T.¹ Apte, P.² Saraswat, K.C.³

2
- 0031332017
- D. J. DiMaria and J. H. Stathis, Appl. Phys. Lett. 71, 3230 (1997).
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3230
- DiMaria, D.J.¹ Stathis, J.H.²

3
- 0001320103
- D. J. DiMaria, Appl. Phys. Lett. 68, 3004 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 3004
- DiMaria, D.J.¹

4
- 0000863885
- D. J. DiMaria and J. H. Stathis, Appl. Phys. Lett. 70, 2708 (1997).
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2708
- DiMaria, D.J.¹ Stathis, J.H.²

5
- 33744905856
- D. J. DiMaria and E. Cartier, J. Appl. Phys. 78, 3883 (1995).
- (1995) J. Appl. Phys. , vol.78 , pp. 3883
- DiMaria, D.J.¹ Cartier, E.²

6
- 21544458715
- D. J. DiMaria, E. Cartier, and D. Arnold, J. Appl. Phys. 73, 3367 (1993).
- (1993) J. Appl. Phys. , vol.73 , pp. 3367
- DiMaria, D.J.¹ Cartier, E.² Arnold, D.³

7
- 21544467967
- D. J. DiMaria and J. W. Stasiak, J. Appl. Phys. 65, 2342 (1989).
- (1989) J. Appl. Phys. , vol.65 , pp. 2342
- DiMaria, D.J.¹ Stasiak, J.W.²

8
- 0029541581
- J. W. Lyding, T.-C. Shen, G. C. Abeln, C. Wang, E. T. Foley, and J. R. Tucker, Mater. Res. Soc. Symp Proc. 380, 187 (1995).
- (1995) Mater. Res. Soc. Symp Proc. , vol.380 , pp. 187
- Lyding, J.W.¹ Shen, T.-C.² Abeln, G.C.³ Wang, C.⁴ Foley, E.T.⁵ Tucker, J.R.⁶

9
- 0000738807
- M. V. Fischetti, D. J. DiMaria, L. Dori, J. Batey, E. Tierney, and J. Stasiak, Phys. Rev. B 35, 4404 (1987).
- (1987) Phys. Rev. B , vol.35 , pp. 4404
- Fischetti, M.V.¹ DiMaria, D.J.² Dori, L.³ Batey, J.⁴ Tierney, E.⁵ Stasiak, J.⁶

10
- 3743116498
- IEEE, New York
- R. Degraeve, G. Groeseneken. R. Bellens, M. Depas, and H. E. Macs, in IEDM 95 (IEEE, New York, 1995), pp. 863-865.
- (1995) IEDM 95 , pp. 863-865
- Degraeve, R.¹ Groeseneken, G.² Bellens, R.³ Depas, M.⁴ Macs, H.E.⁵

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