Electrical properties of thin SiONTTa2O5 gate dielectric stacks

Journal of Applied Physics

Volumn 86, Issue 11, 1999, Pages 6462-6467

  Houssa, M ^a   Degraeve, R ^a   Mertens, P W ^a   Heyns, M M ^a   Jeon, J S ^b   Halliyal, A ^b   Ogle, B ^b  

^a IMEC   (Belgium)

^b ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001239520     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371709     Document Type: Article

References (14)

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