Inorganic sensors utilizing MEMS and microelectronic technologies

Current Opinion in Solid State and Materials Science

Volumn 3, Issue 5, 1998, Pages 501-504

  Tuller, Harry L ^a   Mlcak, Richard ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b 356 Walnut Street   (United States)

Author keywords

MCB microcantilever beam; MEMS microelectromechanical structures; MOSFET metal oxide semiconductor field effect transistor

Indexed keywords

EID: 0000061982     PISSN: 13590286     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-0286(98)80015-6     Document Type: Article

References (38)

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