Design and fabrication of metal bolometers on high porosity silicon layers

Proceedings of the 1998 4th International Workshop on Thermal Investigations of ICs and Microstructures

Volumn , Issue , 1998, Pages 61-64

  Boarino, L ^a   Lerondel, G ^a   Monticone, E ^a   Steni, R ^a   Amato, G ^a   Benedetto, G ^a   Lacquaniti, V ^a   Spagnolo, R ^a   Roussel, P ^a   Lysenko, V ^a   Dittmar, A ^a  

^a ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; MICROMACHINING; PHOTOACOUSTIC EFFECT; POROUS SILICON; SENSORS; THERMAL INSULATION;

HIGH POROSITY SILICON LAYERS; METAL BOLOMETERS;

BOLOMETERS;

EID: 0032304666     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)