LETI/LIR's uncooled microbolometer development

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3436, Issue 2, 1998, Pages 605-610

  Tissot, Jean Luc ^a   Rothan, Frederic ^a   Vedel, Corinne ^a   Vilain, Michel ^a   Yon, Jean Jacques ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; BOLOMETERS; CMOS INTEGRATED CIRCUITS; SILICON SENSORS; THERMAL INSULATING MATERIALS; THERMOMETERS;

UNCOOLED MICROBOLOMETERS;

INFRARED DETECTORS;

EID: 0032299113     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.328060     Document Type: Conference Paper

References (4)