Plastic deformation of thin foil substrates with amorphous silicon islands into spherical shapes

Materials Research Society Symposium - Proceedings

Volumn 621, Issue , 2000, Pages

  Hsu, P H I ^a   Huang, M ^a   Wagner, S ^a   Suo, Z ^a   Sturm, J C ^a  

^a PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; DEGRADATION; METAL FOIL; PLASTIC DEFORMATION; STRAIN; SUBSTRATES;

THIN FOIL SUBSTRATES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034431464     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-621-q8.6.1     Document Type: Conference Paper

References (4)

1. Thin film transistors for foldable displays
2. Failure resistance of amorphous silicon transistors under extreme in-plane strain