Experimental aspects and modeling for quantitative measurements in scanning capacitance microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 5, 2004, Pages 2391-2397

  Giannazzo, F ^a   Goghero, D ^a   Raineri, V ^a  

^a CNR IMM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITANCE; CARRIER CONCENTRATION; COATINGS; CONDUCTIVE MATERIALS; INTERFACES (MATERIALS); NANOSTRUCTURED MATERIALS; OXIDATION; OZONE; RELIABILITY; SCANNING; SEMICONDUCTOR DOPING; SILICA; SILICON; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

EXPERIMENTAL ERRORS; INTERFACE MICROROUGHNESS; NANODEVICES; REPRODUCIBILITY;

MOS DEVICES;

EID: 9744236588     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1795252     Document Type: Article

References (17)

1. J. F. Marchiando and J. J. Kopanski, J. Vac. Sci. Technol. B 22, 411 (2004).
2. E.-S. Kang, H.-J. Hwang, and G.-Y. Lee, J. Vac. Sci. Technol. B 22, 432 (2004).
3. H. E. Ruda and A. Shik, Phys. Rev. B 67, 235309 (2003).
4. J. F. Marchiando, J. J. Kopanski, and J. R. Lowney, J. Vac. Sci. Technol. B 16, 463 (1998).
5. J. F. Marchiando, J. J. Kopanski, and J. Albers, J. Vac. Sci. Technol. B 18, 414 (2000).
6. L. Ciampolini, F. Giannazzo, M. Ciappa, W. Fichtner, and V. Raineri, Mater. Sci. Semicond. Process. 4, 85 (2001).
7. R. Stephenson, A. Verhulst, P. De Wolf, M. Caymax, and W. Vandervost, Appl. Phys. Lett. 73, 2597 (1998).
8. T. Clarysse, M. Caymax, P. De Wolf, T. Trenkler, W. Vandervorst, J. S. McMurray, J Kim, C. C. Williams, J. G. Clark, and G. Neubauer, J. Vac. Sci. Technol. B 16, 394 (1998).
9. D. Goghero, F. Giannazzo, and V. Raineri, Appl. Phys. Lett. 81, 1824 (2002).
10. V. V. Zavyalov, J. S. McMurray, and C. C. Williams, Rev. Sci. Instrum. 70, 158 (1999).
11. D. Goghero, F. Giannazzo, and V. Raineri, Mater. Sci. Eng., B 102, 152 (2003).
12. F. Giannazzo, F. Priolo, V. Raineri, V. Privitera, A. Picariello, and A. Battaglia, S. Moffatt, J. Vac. Sci. Technol. B 20, 414 (2002).
13. J. Smoliner, B. Basnar, S. Golka, E. Gornik, B. Löffler, M. Schatzmayr, and H. Enichlmair, Appl. Phys. Lett. 79, 3182 (2001).
14. H. Yabuhara, M. Ciappa, and W. Fichtner, J. Vac. Sci. Technol. B 20, 783 (2002).
15. L. Ciampolini, M. Ciappa, P. Malberti, and W. Fichtner, AIP Conf. Proc. 550, 647 (2001).
16. J. J. Kopanski, J. F. Marchiando, and B. G. Rennex, J. Vac. Sci. Technol. B 20, 2101 (2002).
17. P. De Wolf (private communication).