Theoretical analysis of scanning capacitance microscopy

Physical Review B - Condensed Matter and Materials Physics

Volumn 67, Issue 23, 2003, Pages

  Ruda, H E ^a   Shik, A ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; ELECTRIC CAPACITANCE; ELECTRIC POTENTIAL; GEOMETRY; LAPLACE EQUATION; POISSON EQUATION; SCANNING CAPACITANCE MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; STATISTICAL ANALYSIS; THEORY; VACUUM;

EID: 0042666800     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.67.235309     Document Type: Article

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