메뉴 건너뛰기




Volumn 22, Issue 1, 2004, Pages 432-438

Nondestructive dopant profile measurement and its quantitative analysis using the nanocapacitance-voltage method

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BANDWIDTH; CAPACITANCE; CAPACITORS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; INTEGRATED CIRCUITS; NONDESTRUCTIVE EXAMINATION; RESONATORS; SCANNING; SECONDARY ION MASS SPECTROMETRY; SENSITIVITY ANALYSIS; SENSORS;

EID: 1642277073     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1640657     Document Type: Conference Paper
Times cited : (2)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.