A Physical Model of Solenoid Inductors on Silicon Substrates

IEEE Transactions on Microwave Theory and Techniques

Volumn 55, Issue 12, 2007, Pages 2579-2585

  Tai, Chih Ming ^a   Liao, Chien Neng ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Inductor model; quality factor; self resonance; silicon; solenoid inductor; substrate loss; surface micromachining

Indexed keywords

EID: 85008055663     PISSN: 00189480     EISSN: 15579670     Source Type: Journal    
DOI: 10.1109/TMTT.2007.910069     Document Type: Article

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