High-quality solenoid inductors on silicon wafers

2006 International Conference on Communications, Circuits and Systems, ICCCAS, Proceedings

Volumn 2, Issue , 2006, Pages 866-869

  Tai, Chih Ming ^a   Liao, Chien Neng ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPACITANCE MEASUREMENT; DIELECTRIC MATERIALS; ELECTRIC INDUCTORS; MICROMACHINING; SOLENOIDS;

PARASITIC CAPACITANCE; PEAK QUALITY FACTORS;

SILICON WAFERS;

EID: 39749147654     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICCCAS.2006.284789     Document Type: Conference Paper

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