Micromachined acoustic wave resonator isolated from substrate

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 8, 2005, Pages 1239-1246

  Pang, Wei ^a,b   Zhang, Hao ^a,b   Kim, Eun Sok ^a,b,c  

^a IEEE   (United States)

^b University of Southern California ^*  (United States)

^c Department of Electrical Engineering ^*

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE LAYERS; FILM BULK ACOUSTIC-WAVE RESONATORS (FBAR); SILICON MICROMACHINING;

ELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRIC DEVICES; RESONATORS; SILICON; ZINC OXIDE;

ACOUSTIC WAVES;

EID: 27644458111     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1509782     Document Type: Article

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