Modification of tin dioxide thin films by ion implantation

Applied Surface Science

Volumn 161, Issue 3, 2000, Pages 459-464

  Tao, Zhang ^a   Junda, Hou ^a   Hong, Liang ^a  

^a BEIJING RADIATION CENTER   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CRYSTALLINE MATERIALS; ION IMPLANTATION; PHASE TRANSITIONS; SEMICONDUCTING TIN COMPOUNDS; SPUTTER DEPOSITION; SURFACE TREATMENT; THERMAL EFFECTS; THIN FILMS;

TIN DIOXIDE;

SEMICONDUCTING FILMS;

EID: 0034224396     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00359-7     Document Type: Article

References (21)

1. Schierbaum K.D., Weimar U., Gopel W. Sensors and Actuators B. 2(1):1990;71.
2. Sanjines R., Levy F., Demarne V., Grisel A. Sensors and Actuators B. 1(1-6):1990;130.
3. Sadaoka Y., Sakai Y. J. Mater. Sci. 21:1986;3717.
4. Shimizu Y., Shimabukuro M., Arai H. J. Electrochem. Soc. 136(12):1989;3868.
5. Gang Z.Z., Gang Z., Ming W., Tai Z.Z. Sensors and Actuators. 19:1989;71.
6. Yeh Y.C., Tseng T.Y., Chang D.A. Commun. Am. Ceram. Soc. 72(8):1989;1472.
7. Sadaoka Y., Sakai Y., Aono H. J. Mater. Sci. 22:1987;3685.
8. Sakai Y., Sadaoko Y., Matsuguchi M. J. Electrochem. Soc. 136(1):1989;171.
9. Kenefusa S., Nitta M., Haradome M. IEEE Trans. Electron. Devices. 35(1):1988;65.
10. Egashira M., Toshida Y., Kawasumi S. Sensors and Actuators. 9:1986;147.
11. Brignell J.E., White N.M., Cranny A.W.J. IEEE Proc. 135(4):1988;77.
12. Fang Y.K., Lee J.J. Thin Solid Films. 169:1989;51.
13. Suzuki T., Yamazaki T., Yoshioka H. J. Mater. Sci. 23:1988;1106.
14. Coles G.S.V., Gallagher K.J. Sensors and Actuators. 7:1985;89.
15. Jang D.H., Chun J.S. Thin Solid Films. 169:1989;57.
16. Sberveglieri G., Groppelli S., Coccoli G. Sensors and Actuators. 15:1989;235.
17. Butta N., Melli M., Pizzini S. Sensors and Actuators B. 2(2):1990;151.
18. Xu C., Jun T., Miura N., Yamazoe N. Chem. Lett. 3:1990;441.
19. Sberveglieri G. Sensors and Actuators B. 6:1992;239.
20. Zhang T., Zhang T.H. Nucl. Instrum. Methods. Phys. Res. B. 122:1997;59.
21. Xu C., Tamaki J., Miura N., Yamazoe N. J. Mater. Sci. 27:1992;963.