A digital CMOS micro-hotplate array for analysis of environmentally relevant gases

ESSCIRC 2004 - Proceedings of the 30th European Solid-State Circuits Conference

Volumn , Issue , 2004, Pages 299-302

  Frey, U ^a   Graf, M ^a   Taschini, S ^a   Kirstein, K U ^a   Hagleitner, C ^b   Hierlemann, A ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CHEMICAL SENSORS; ELECTRIC RESISTANCE; GASES; MICROMACHINING; MOS DEVICES; NEURAL NETWORKS; TEMPERATURE CONTROL; TIN COMPOUNDS; TRANSISTORS;

BLOCK DIAGRAMS; MODULAR SYSTEMS; MOS-TRANSISTOR HEATERS; SIGNAL CONDITIONING CIRCUITRY;

CMOS INTEGRATED CIRCUITS;

EID: 17644417864     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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9. austriamicrosystems, Unterpremstätten, Austria