Lateral redistribution of trapped charges in nitride/oxide/Si (NOS) investigated by electrostatic force microscopy

Nanoscale

Volumn 3, Issue 6, 2011, Pages 2560-2565

  Baik, Seung Jae ^a   Lim, Koeng Su ^a   Choi, Wonsup ^b   Yoo, Hyunjun ^b   Lee, Jang Sik ^b   Shin, Hyunjung ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Kookmin University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85006170534     PISSN: 20403364     EISSN: 20403372     Source Type: Journal    
DOI: 10.1039/c1nr10104h     Document Type: Article

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