Excess silicon at the Si3N4/SiO2 interface

Applied Physics Letters

Volumn 72, Issue 4, 1998, Pages 462-464

  Gritsenko, V A ^a   Petrenko, I P ^a   Svitasheva, S N ^a   Wong, Hei ^b  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000443705     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120786     Document Type: Article

References (19)

1. J. Himpsel, F. R. McFeely, A. Tabel-Ibragimi, J. A. Yarmoff, and G. Hollinger, Phys. Rev. B 38, 6084 (1988).
2. S. Witham and P. M. Lenahan, Appl. Phys. Lett. 51, 1007 (1987).
3. E. Suzuki, Y. Hayashi, K. Ishi, and T. Tsuchiya, Appl. Phys. Lett. 42, 608 (1983).
4. A. P. Aganin, V. M. Maslovskii, and A. P. Nagin, Microelectron. (Sov.) 17, 348 (1988).
5. S. I. Raider, R. Flitsh, J. Aboaf, and W. A. Pliskin, J. Electrochem. Soc. 123, 560 (1976).
6. V. P. Bolotin, I. A. Brytov, V. A. Gritsenko, B. Z. Olshanezkii, V. P. Popov, A. V. Rzhanov, Y. N. Romasheuko, V. G. Seryapin, and S. A. Tiis, Sov. Phys. Dokl. 310, 114 (1990).
7. M. M. Guraya, et al. Phys. Rev. B 49, 5677 (1990).
8. V. G. Lifshiz, V. G. Kotlar, and A. A. Saranin, Surface (Sov.) 12, 76 (1984).
9. J. A. Wurzbach and F. J. Grunthaner, J. Electrochem. Soc. 130, 991 (1983).
10. I. A. Brytov, V. A. Gritsenko, and Yu. N. Romashenko, Sov. Phys. JETP 89, 562 (1985).
11. V. A. Gritsenko, Electronic Properties of Amorphous Dielectrics in Silicon MIS Structures (Science, Novosibirsk, 1993).
12. V. A. Gritsenko, Silicon Nitride in Electronics (Elsevier, New York, 1988), Vol. 34.
13. R. Karcher, L. Ley, and R. L. Johnson, Phys. Rev. B 30, 1896 (1984).
14. F. R. McFeely, E. Cartier, J. A. Yarmoff, and S. A. Joyce, Phys. Rev. B 42, 5191 (1990).
15. V. A. Gritsenko and P. A. Pundur, Sov. Phys. Solid State 28, 1829 (1986).
16. P. A. Pundur, J. G. Shavalgin, and V. A. Gritsenko, Phys. Status Solidi A. Phys. Res. 94, K107 (1986).
17. V. A. Gritsenko and A. D. Milov, JETP Lett. 64, 531 (1996).
18. V. O. Sokolov and V. B. Sulimov, Phys. Status Solidi: B. Phys. Res. 135, 369 (1986).
19. V. A. Gritsenko, Yu. N. Morokov, Yu. N. Novikov, H. Wong, and Y. C. Cheng, Mater. Res. Soc. Symp. Proc. (in press).