Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators

Journal of Applied Physics

Volumn 92, Issue 7, 2002, Pages 4062-4069

  Lee, Si Hyung ^a,b   Yoon, Ki Hyun ^a   Lee, Jeon Kook ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALN FILMS; BULK ACOUSTIC WAVE RESONATOR; EFFECTIVE COUPLING; ELECTRICAL LOSS; ELECTRODE CONFIGURATIONS; ELECTRODE EFFECTS; FILM BULK ACOUSTIC-WAVE RESONATORS; PIEZOELECTRIC COUPLING CONSTANTS; PIEZOELECTRIC FILM; Q-VALUES; QUALITY FACTORS; QUALITY VALUE; SCATTERING LOSS; SOLIDLY MOUNTED RESONATOR; THICK ELECTRODES; WAVE ATTENUATION; WAVE SCATTERING; WEIGHTED AVERAGES;

ACOUSTIC WAVES; ACOUSTICS; PIEZOELECTRICITY; RESONATORS; SURFACE ROUGHNESS;

MOLYBDENUM;

EID: 18644363771     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1505977     Document Type: Article

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