Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition

Advanced Materials

Volumn 27, Issue 35, 2015, Pages 5223-5229

  Ahn, Chisung ^a   Lee, Jinhwan ^b   Kim, Hyeong U ^a   Bark, Hunyoung ^a   Jeon, Minhwan ^a   Ryu, Gyeong Hee ^c   Lee, Zonghoon ^c   Yeom, Geun Young ^a,b   Kim, Kwangsu ^d   Jung, Jaehyuck ^a   Kim, Youngseok ^b   Lee, Changgu ^a   Kim, Taesung ^a  

^a Sungkyunkwan University   (South Korea)

^b Sungkyunkwan University   (South Korea)

^c Ulsan National Institute of Science and Technology   (South Korea)

^d SAMSUNG Electronics   (South Korea)

Author keywords

flexible sensor; low temperature; molybdenum disulfide (MoS2< inf>); plasma enhanced chemical vapor deposition (PECVD); plastic substrate

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; LOW TEMPERATURE EFFECTS; MOLYBDENUM; MOLYBDENUM COMPOUNDS; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; SULFUR COMPOUNDS; TEMPERATURE; THIN FILMS;

FLEXIBLE SENSOR; LOW TEMPERATURES; MOLYBDENUM DISULFIDE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS (PE CVD); PLASTIC SUBSTRATES;

VAPOR DEPOSITION;

EID: 84941318210     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201501678     Document Type: Article

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