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Volumn 259, Issue 2, 2015, Pages 114-120

High-resolution, high-throughput imaging with a multibeam scanning electron microscope

Author keywords

High throughput imaging; Multibeam; Parallel data acquisition; Scanning electron microscopy

Indexed keywords

DATA ACQUISITION; ELECTRON-ELECTRON INTERACTIONS; ELECTRONS; THROUGHPUT;

EID: 84937251613     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/jmi.12224     Document Type: Article
Times cited : (188)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.