A comparison of conventional Everhart-Thornley style and in-lens secondary electron detectors-a further variable in scanning electron microscopy

Scanning

Volumn 33, Issue 3, 2011, Pages 162-173

  Griffin, Brendan J ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

electron optics; electron solid interactions; imaging; microanalysis; SEM

Indexed keywords

CONTRAST TRANSFER FUNCTION; ELECTRON-SOLID INTERACTION; ELECTROSTATIC MIRROR; ENERGY FILTERING; IMAGE DATA; LOW-VOLTAGE; MECHANICAL DESIGN; OPERATING CONDITION; SCANNING ELECTRON MICROSCOPES; SECONDARY ELECTRONS; SURFACE DETAILS; SURFACE FILMS; UNDER MATCHED; WORKING DISTANCES;

DETECTORS; IMAGE RESOLUTION; MICROANALYSIS; SCANNING ELECTRON MICROSCOPY; SECONDARY EMISSION;

ELECTRONS;

ARTICLE; COMPARATIVE STUDY; ELECTRIC POTENTIAL; IMAGE ANALYSIS; MICROANALYSIS; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPY;

EID: 79960739056     PISSN: 01610457     EISSN: 19328745     Source Type: Journal    
DOI: 10.1002/sca.20255     Document Type: Article

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