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Volumn 24, Issue 1, 2015, Pages

Application of extremely non-equilibrium plasmas in the processing of nano and biomedical materials

Author keywords

composite; nanospikes; nanowires; O atom density; oxygen plasma; polymer

Indexed keywords

BIOMEDICAL ENGINEERING; COMPOSITE MATERIALS; ETCHING; HYDROPHILICITY; METAL NANOPARTICLES; METALS; NANOWIRES; OXYGEN; POLYMERS; SURFACE PROPERTIES;

EID: 84921735287     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/24/1/015026     Document Type: Article
Times cited : (37)

References (51)
  • 24
    • 84921797605 scopus 로고    scopus 로고
    • A capacitively coupled electrodeless plasma apparatus and a method using capacitively coupled electrodeless plasma for processing a silicon substrate
    • Luxiang X U, Chia Sern C and Shuyan X U 2014 A capacitively coupled electrodeless plasma apparatus and a method using capacitively coupled electrodeless plasma for processing a silicon substrate Patent application WO/2014/133465
    • (2014) Patent Application
    • Luxiang, X.U.1    Chia Sern, C.2    Shuyan, X.U.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.