Recombination of oxygen atomic excited states produced by non-equilibrium RF plasma on different semiconductor materials: Catalytic phenomena and modelling

Catalysis Today

Volumn 89, Issue 1-2, 2004, Pages 159-167

  Guyon, C ^a   Cavadias, S ^a   Mabille, I ^a   Moscosa Santillan, M ^a   Amouroux, J ^a  

^a PSL RESEARCH UNIVERSITY   (France)

Author keywords

Catalycity; Chemkin ; Oxide semiconductors; Oxygen; Plasma; Recombination

Indexed keywords

ACTIVATION ENERGY; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; ELECTRON ENERGY LEVELS; OXYGEN; PLASMA APPLICATIONS;

CATALYCITY; CHEMKIN®; OXIDE SEMICONDUCTORS; PLASMA; RECOMBINATION;

SEMICONDUCTOR MATERIALS;

EID: 0842300631     PISSN: 09205861     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cattod.2003.11.022     Document Type: Conference Paper

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