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Volumn 9, Issue 2, 2012, Pages 207-216

Interaction mechanisms between Ar-O 2 post-discharge and biphenyl

Author keywords

biphenyl; films; melting point; plasma cleaning; post discharge

Indexed keywords

[4 + 2] CYCLOADDITION; AFTER-TREATMENT; ALCOHOL GROUP; ATOMIC OXYGEN; BIPHENYL; CLEAN SURFACES; ETCHING PROCESS; ETCHING RATE; INTERACTION MECHANISMS; MAIN PROCESS; PHENYL RINGS; PLASMA CLEANING; POST-DISCHARGE; PRE-TREATMENT; RING OPENING; SINGLET STATE;

EID: 84856915908     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.201100119     Document Type: Article
Times cited : (16)

References (49)
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    • 0345827408 scopus 로고
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    • Frimer, A.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.