Transition from e to H mode in inductively coupled oxygen plasma: Hysteresis and the behaviour of oxygen atom density

EPL

Volumn 95, Issue 5, 2011, Pages

  Zaplotnik, R ^a   Vesel, A ^a   Mozetic, M ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 80052327358     PISSN: 02955075     EISSN: 12864854     Source Type: Journal    
DOI: 10.1209/0295-5075/95/55001     Document Type: Article

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